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Overview

Core Components That Complete Your Process

From photo chucks, vacuum chucks, ESCs, and GDPs to ceramic heaters,
we provide reliable solutions through designs optimized for each process and precision machining.

Photo Chuck

  • Semiconductor Applications
  • Display Applications

Vacuum Chuck

  • Wafer Inspection & Metrology Equipment
  • Hybrid Bonding Applications

ESC

  • Semiconductor (ETCH / CVD / PVD / Implant / Laser Dicing)
  • Display (OLED Laser Cutting, OLEDoS Deposition)

GDP

  • Semiconductor (ETCH)

Ceramic Heater

  • Semiconductor (CVD / PVD)